Kurt J Lesker PVD 75 OLED Organic Materials Evaporation Deposition System  

Single 10cc Luxel Radak resistive heated evaporation source.

RADAK® and OLED Furnaces are resistance heated vacuum evaporators. They offer excellent control in the evaporation of materials up to 500°C. Thermocouple control permits accurate deposition rates, vapor temperature, and reproducible vapor species for consistent film characteristics.  

System includes crystal film thickness monitor to assist in accurate film thickness deposition.

 System pump down and other controls are computer controlled with an easy-to-use graphical user interface.

 High vacuum achieved using CTI cryopump.

 System roughing pump is also included.

 Chamber size: Box, 14'' (356mm) wide X 14.69'' deep (373mm) X 24'' (610mm) high

 208V,1Ph, 60Hz, 30A